ISO/DTS 25138

Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry ISO/DTS 25138

General information

Current stage: 50.00 Final text received or FDIS registered for formal approval Sep 17, 2024

Originator: ISO

Owner: ISO/TC 201/SC 8 Glow discharge spectroscopy

Type: Technical Specification

ICS: 71.040.40 Chemical analysis

Scope

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

Life cycle

PREVIOUSLY

PUBLISHED
ISO/TS 25138:2019

NOW

IN_DEVELOPMENT
ISO/DTS 25138
50.00 Final text received or FDIS registered for formal approval
Sep 17, 2024