ISO/AWI 23131-3

Ellipsometry — Part 3: Transparent single layer model ISO/AWI 23131-3

General information

Current stage: 20.00 New project registered in TC/SC work programme Jan 26, 2024

Originator: ISO

Owner: ISO/TC 107 Metallic and other inorganic coatings

Type: International Standard

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

Life cycle

NOW

IN_DEVELOPMENT
ISO/AWI 23131-3
20.00 New project registered in TC/SC work programme
Jan 26, 2024