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ISO 5302:2003

Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics ISO 5302:2003

Publication date:   Jul 11, 2003

95.99   Withdrawal of Standard   Nov 29, 2018

General information

95.99   Withdrawal of Standard   Nov 29, 2018

ISO

ISO/TC 112 Vacuum technology

International Standard

23.160   Vacuum technology

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Scope

ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.

Life cycle

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WITHDRAWN
ISO 5302:2003
95.99 Withdrawal of Standard
Nov 29, 2018




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