ISO 27893:2011

Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge ISO 27893:2011

Publication date:   Aug 10, 2011

Scope

ISO 27893:2011 gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge carried out in accordance with ISO/TS 3567.
ISO 27893:2011 describes methods for uniform reporting of uncertainties in vacuum gauge certificates. Uncertainties reported in accordance with the guidelines given in ISO 27893:2011 are transferable in the sense that the uncertainty evaluated for one result can be used as a component in the uncertainty evaluation of another measurement or calibration in which the first result is used.
ISO 27893:2011 defines two measurement models that are sufficient to cover most practical cases. However, it is possible that the models given cannot be applied to newly developed vacuum gauges.