60.60 Standard published Dec 21, 2022
ISO
ISO/TC 213 Dimensional and geometrical product specifications and verification
International Standard
17.040.40 Geometrical Product Specification (GPS) | 17.040.20 Properties of surfaces
This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in ISO 25178-600.
Because surface profiles can be extracted from surface topography images, most of the methods described in this document can be adapted to profiling instruments.
Instrument-specific issues are not covered by this document. For example, for instruments based on mechanical probing where the probe follows an additional arcuate motion, additional measures are specified in ISO 25178-701.
This document does not include procedures for area-integrating methods, although those are also stated in ISO 25178-6. For example, light scattering belongs to a class of techniques known as area-integrating methods for measuring surface topography.
PUBLISHED
ISO 25178-700:2022
60.60
Standard published
Dec 21, 2022