60.60 Standard published Jul 13, 2022
ISO
ISO/TC 201/SC 9 Scanning probe microscopy
International Standard
71.040.40 Chemical analysis
This document describes a procedure for the quantitative characterization of the probe tip of an atomic force microscope (AFM) probe and a restoration of AFM topography images dilated by finite probe size. The three-dimensional shape of the probe apex is extracted by image reconstruction using suitable reference materials. This document is applicable to the reconstruction of AFM topography images of solid material surfaces.
PUBLISHED
ISO 23729:2022
60.60
Standard published
Jul 13, 2022