ISO 22278:2020

Name: ISO 22278:2020
Brand: ISO
SKU: ISO 22278:2020
Price: 192.39 EUR
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Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

Publication date: Aug 24, 2020

General information

Current stage: 90.60 Close of review Dec 3, 2025

Originator: ISO

Owner: ISO/TC 206 Fine ceramics

Type: International Standard

ICS: 81.060.30 Advanced ceramics

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Status: Published

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Languages: English

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Scope

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

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PUBLISHED
ISO 22278:2020
90.60 Close of review
Dec 3, 2025