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ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam ISO 22278:2020

Publication date:   Aug 24, 2020

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90.60   Close of review   Dec 3, 2025

ISO

ISO/TC 206 Fine ceramics

International Standard

81.060.30   Advanced ceramics

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This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

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PUBLISHED
ISO 22278:2020
90.60 Close of review
Dec 3, 2025




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