60.60 Standard published Aug 24, 2020
ISO
ISO/TC 206 Fine ceramics
International Standard
81.060.30 Advanced ceramics
Published
This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.
PUBLISHED
ISO 22278:2020
60.60
Standard published
Aug 24, 2020