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ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam ISO 22278:2020

Publication date:   Aug 24, 2020

General information

60.60 Standard published   Aug 24, 2020

ISO

ISO/TC 206 Fine ceramics

International Standard

81.060.30   Advanced ceramics

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Scope

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

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PUBLISHED
ISO 22278:2020
60.60 Standard published
Aug 24, 2020