0

ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment ISO 21859:2019

Publication date:   Jun 18, 2019

General information

90.93   Standard confirmed   Oct 4, 2024

ISO

ISO/TC 206 Fine ceramics

International Standard

81.060.30   Advanced ceramics

Buying

Published

Language in which you want to receive the document.

Scope

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

Life cycle

NOW

PUBLISHED
ISO 21859:2019
90.93 Standard confirmed
Oct 4, 2024




Access Genorma App Everywhere

Get fast and easy access to top European and International standards (EN, ISO, IEC) via your mobile phone, tablet or the web.

Google Play App Store Web Version