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ISO 21360-6:2023

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

Publication date:   Dec 6, 2023

General information

60.60 Standard published   Dec 6, 2023

ISO

ISO/TC 112 Vacuum technology

International Standard

23.160   Vacuum technology

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Scope

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Life cycle

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PUBLISHED
ISO 21360-6:2023
60.60 Standard published
Dec 6, 2023