60.60 Standard published Dec 6, 2023
ISO
ISO/TC 112 Vacuum technology
International Standard
23.160 Vacuum technology
This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.
PUBLISHED
ISO 21360-6:2023
60.60
Standard published
Dec 6, 2023