90.93 Standard confirmed Jun 10, 2024
ISO
ISO/TC 112 Vacuum technology
International Standard
23.160 Vacuum technology
This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.
This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
PUBLISHED
ISO 20146:2019
90.93
Standard confirmed
Jun 10, 2024