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ISO 19668:2017

Surface chemical analysis — X-ray photoelectron spectroscopy — Estimating and reporting detection limits for elements in homogeneous materials

Publication date:   Aug 14, 2017

General information

90.60 Close of review   Dec 3, 2022

ISO

ISO/TC 201/SC 7 Electron spectroscopies

International Standard

71.040.40   Chemical analysis

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Scope

ISO 19668:2017 specifies a procedure by which elemental detection limits in X-ray photoelectron spectroscopy (XPS) can be estimated from data for a particular sample in common analytical situations and reported. This document is applicable to homogeneous materials and is not applicable if the depth distribution of elements is inhomogeneous within the information depth of the technique.

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PUBLISHED
ISO 19668:2017
90.60 Close of review
Dec 3, 2022