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ISO 17297:2025

Microbeam analysis — Focused ion beam application for TEM specimen preparation — Vocabulary

Publication date:   May 26, 2025

General information

60.60   Standard published   May 26, 2025

ISO

ISO/TC 202/SC 1 Terminology

International Standard

01.040.71   Chemical technology (Vocabularies) | 71.040.50   Physicochemical methods of analysis

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Scope

This document defines the most commonly used terms for transmission electron microscopy (TEM) specimen preparation using focused ion beam (FIB).

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PUBLISHED
ISO 17297:2025
60.60 Standard published
May 26, 2025