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ISO 15632:2021

Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

Publication date:   Feb 12, 2021

General information

60.60 Standard published   Feb 12, 2021

ISO

ISO/TC 202 Microbeam analysis

International Standard

71.040.99   Other standards related to analytical chemistry

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Scope

This document defines the most important quantities that characterize an energy-dispersive X‑ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this document.


Life cycle

PREVIOUSLY

WITHDRAWN
ISO 15632:2012

NOW

PUBLISHED
ISO 15632:2021
60.60 Standard published
Feb 12, 2021