95.99 Withdrawal of Standard Feb 12, 2021
ISO
ISO/TC 202 Microbeam analysis
International Standard
71.040.99 Other standards related to analytical chemistry
This International Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This International Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this International Standard.
WITHDRAWN
ISO 15632:2002
WITHDRAWN
ISO 15632:2012
95.99
Withdrawal of Standard
Feb 12, 2021
PUBLISHED
ISO 15632:2021