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ISO 14644-6:2007

Cleanrooms and associated controlled environments — Part 6: Vocabulary ISO 14644-6:2007

Publication date:   Jul 4, 2007

95.99   Withdrawal of Standard   Apr 23, 2014

General information

95.99   Withdrawal of Standard   Apr 23, 2014

ISO

ISO/TC 209 Cleanrooms and associated controlled environments

International Standard

13.040.35   Cleanrooms and associated controlled environments

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ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.

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ISO 14644-6:2007
95.99 Withdrawal of Standard
Apr 23, 2014




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