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Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration
90.93 Standard confirmed
Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination
60.60 Standard published
Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
90.60 Close of review
Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
90.60 Close of review
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
90.60 Close of review
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
90.60 Close of review
Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices
90.60 Close of review
Cleanrooms and associated controlled environments — Part 17: Particle deposition rate applications
60.60 Standard published
Cleanrooms and associated controlled environments — Part 18: Assessment of suitability of consumables
60.60 Standard published
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
90.93 Standard confirmed
Cleanrooms and associated controlled environments — Part 21: Airborne particle sampling techniques
60.60 Standard published
Cleanrooms and associated controlled environments — Part 3: Test methods
90.60 Close of review
Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
60.60 Standard published
Cleanrooms and associated controlled environments — Part 5: Operations
90.92 Standard to be revised
Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
90.92 Standard to be revised
Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)
60.60 Standard published
Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration
60.60 Standard published
Cleanrooms and associated controlled environments — Biocontamination control — Part 1: General principles and methods
90.60 Close of review
