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ISO 14644-3:2005

Cleanrooms and associated controlled environments — Part 3: Test methods

Publication date:   Dec 6, 2005

95.99 Withdrawal of Standard   Aug 30, 2019

General information

95.99 Withdrawal of Standard   Aug 30, 2019

ISO

ISO/TC 209 Cleanrooms and associated controlled environments

International Standard

13.040.35   Cleanrooms and associated controlled environments

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Scope

ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational.
ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

Life cycle

NOW

WITHDRAWN
ISO 14644-3:2005
95.99 Withdrawal of Standard
Aug 30, 2019

REVISED BY

PUBLISHED
ISO 14644-3:2019