90.60 Close of review Dec 3, 2023
ISO
ISO/TC 209 Cleanrooms and associated controlled environments
International Standard
13.040.35 Cleanrooms and associated controlled environments
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.
The monitoring given in this document is for use mainly in "operational" states.
NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
ABANDON
ISO/DIS 14644-12
PUBLISHED
ISO 14644-12:2018
90.60
Close of review
Dec 3, 2023