ISO 14644-10:2013

Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration

Publication date:   Mar 1, 2013

95.99 Withdrawal of Standard   May 4, 2022

General information

95.99 Withdrawal of Standard   May 4, 2022

ISO

ISO/TC 209 Cleanrooms and associated controlled environments

International Standard

13.040.35   Cleanrooms and associated controlled environments

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Scope

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Life cycle

NOW

WITHDRAWN
ISO 14644-10:2013
95.99 Withdrawal of Standard
May 4, 2022

REVISED BY

PUBLISHED
ISO 14644-10:2022