ISO 13084:2025

Surface chemical analysis — Mass spectrometries — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer ISO 13084:2025

Publication date:   Oct 23, 2025

Scope

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. This document is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. This document gives guidance for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.