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ISO 11938:2012

Microbeam analysis — Electron probe microanalysis — Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy

Publication date:   Mar 6, 2012

General information

90.93 Standard confirmed   Dec 5, 2022

ISO

ISO/TC 202/SC 2 Electron probe microanalysis

International Standard

71.040.50   Physicochemical methods of analysis

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Scope

This International Standard provides procedures for electron microprobe elemental-mapping analysis using
wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally
across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is
assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method,
the calibration method, the correlation method and the matrix correction method.

Life cycle

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PUBLISHED
ISO 11938:2012
90.93 Standard confirmed
Dec 5, 2022