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ISO 11505:2025

Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry

Publication date:   Jun 19, 2025

General information

60.60   Standard published   Jun 19, 2025

ISO

ISO/TC 201/SC 8 Glow discharge spectroscopy

International Standard

71.040.40   Chemical analysis

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Scope

This document specifies a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.
The applicability of this document is limited to description of general procedures for quantification of the chemical composition and thickness in GD-OES compositional depth profiling. This document is not directly applicable for quantification of individual materials having various thicknesses and elements to be determined.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 11505:2012

NOW

PUBLISHED
ISO 11505:2025
60.60 Standard published
Jun 19, 2025