IEC TS 62607-6-5:2022 ED1

Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement IEC TS 62607-6-5:2022 ED1

Publication date:   Dec 14, 2022

Scope

IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristics

contact resistance, and
sheet resistance

for graphene-based materials and other two-dimensional materials by a


transmission line measurement.

The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.


The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.