IEC 63567-1 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle IEC 63567-1 ED1

Current stage: 30.20 CD study/ballot initiated Jul 12, 2024

Next stage: PCC Next stage date : Nov 1, 2024

Originator: IEC

Owner: TC 47

Type: International Standard

ICS: 31.080.99 Other semiconductor devices

IN_DEVELOPMENT
IEC 63567-1 ED1
30.20 CD study/ballot initiated
Jul 12, 2024