IEC 63567-1 ED1

Semiconductor devices - Performance evaluation of semiconductor components and equipment - Part 1: Transmittance evaluation method of EUV pellicle IEC 63567-1 ED1

General information

20.99 WD approved for registration as CD   Apr 5, 2024

CD    Aug 31, 2024

IEC

TC 47

International Standard

31.080.99   Other semiconductor devices

Life cycle

NOW

IN_DEVELOPMENT
IEC 63567-1 ED1
20.99 WD approved for registration as CD
Apr 5, 2024