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IEC 63068-5 ED1

Semiconductor devices - Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 5: Test method for defects using X-ray topography

General information

30.60 Close of voting/ comment period   Sep 6, 2024

IEC

TC 47

International Standard

31.080.99   Other semiconductor devices

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IEC 63068-5 ED1
30.60 Close of voting/ comment period
Sep 6, 2024