IEC 62417:2010 ED1

Semiconductor devices - Mobile ion tests for metal-oxide semiconductor field effect transistors (MOSFETs) IEC 62417:2010 ED1

Publication date:   Apr 22, 2010

Scope

IEC 62417:2010 provides a wafer level test procedure to determine the amount of positive mobile charge in oxide layers in metal-oxide semiconductor field effect transistors. It is applicable to both active and parasitic field effect transistors. The mobile charge can cause degradation of microelectronic devices, e.g. by shifting the threshold voltage of MOSFETs or by inversion of the base in bipolar transistors.