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IEC 62047-64 ED1

Semiconductor devices - Micro-electromechanical devices - Part 64: Test methods of Terahertz sensing antenna-coupled MEMS bolometer

General information

20.99   WD approved for registration as CD   Jun 26, 2026

CD    Jan 22, 2027

IEC

TC 47/SC 47F

International Standard

31.080.99   Other semiconductor devices

Life cycle

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IN_DEVELOPMENT
IEC 62047-64 ED1
20.99 WD approved for registration as CD
Jun 26, 2026