IEC 62047-64 ED1

Semiconductor devices - Micro-electromechanical devices - Part 64: Test methods of Terahertz sensing antenna-coupled MEMS bolometer IEC 62047-64 ED1

Current stage: 20.99 WD approved for registration as CD Jun 26, 2026

Next stage: CD Next stage date : Jan 22, 2027

Originator: IEC

Type: International Standard

ICS: 31.080.99 Other semiconductor devices

IN_DEVELOPMENT
IEC 62047-64 ED1
20.99 WD approved for registration as CD
Jun 26, 2026

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