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IEC 62047-60 ED1

Semiconductor devices - Micro-electromechanical systems - Part 60: Test methods for sensing performances of MEMS resonant electric-field-sensitive devices

General information

20.99   WD approved for registration as CD   Sep 12, 2025

CD    Jan 23, 2026

IEC

TC 47/SC 47F

International Standard

31.080.99   Other semiconductor devices

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-60 ED1
20.99 WD approved for registration as CD
Sep 12, 2025