IEC 62047-55 ED1

Semiconductor devices - Micro-electromechanical devices - Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact

Current stage: 30.99 CD approved for registration as DIS Feb 6, 2026

Next stage: TCDV Next stage date : Jun 26, 2026

Originator: IEC

Type: International Standard

ICS: 31.080.99 Other semiconductor devices

IN_DEVELOPMENT
IEC 62047-55 ED1
30.99 CD approved for registration as DIS
Feb 6, 2026