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IEC 62047-34:2019 ED1

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

Publication date:   Apr 5, 2019

General information

60.60   Standard published   Apr 5, 2019

IEC

TC 47/SC 47F

International Standard

31.080.99   Other semiconductor devices | 31.140   Piezoelectric devices

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Scope

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

Life cycle

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PUBLISHED
IEC 62047-34:2019 ED1
60.60 Standard published
Apr 5, 2019