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IEC 62047-1:2016 ED2

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Publication date:   Jan 6, 2016

General information

60.60 Standard published   Jan 6, 2016

IEC

TC 47/SC 47F

International Standard

31.080.99   Other semiconductor devices

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Scope

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.

Life cycle

PREVIOUSLY

WITHDRAWN
IEC 62047-1:2005 ED1

NOW

PUBLISHED
IEC 62047-1:2016 ED2
60.60 Standard published
Jan 6, 2016