99.60 Withdrawal effective Jan 6, 2016
IEC
International Standard
31.080.99 Other semiconductor devices
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
WITHDRAWN
IEC 62047-1:2005 ED1
99.60
Withdrawal effective
Jan 6, 2016
PUBLISHED
IEC 62047-1:2016 ED2