90.93 Standard confirmed Apr 3, 2008
CEN
CEN/TC 307 Oilseeds, vegetable and animal fats and oils and their by-products - Methods of sampling and analysis
European Norm
67.200.10 Animal and vegetable fats and oils
Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
The main structural materials for MEMS, micromachines and similar devices have special features such as typical dimensions in the order of a few microns, a material fabrication by deposition, and a test piece fabrication by non-mechanical machining using etching and photolithography. This International Standard specifies the testing method, which enables a guarantee of accuracy corresponding to the special features.
PUBLISHED
EN ISO 6800:1997
90.93
Standard confirmed
Apr 3, 2008