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EN ISO 25178-603:2025

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO 25178-603:2025)

Publication date:   Apr 14, 2025

General information

60.60   Standard published   Feb 26, 2025

CEN

CEN/TC 290 Dimensional and geometrical product specification and verification

European Norm

17.040.20   Properties of surfaces

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Scope

This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

Life cycle

PREVIOUSLY

WITHDRAWN
EN ISO 25178-603:2013

NOW

PUBLISHED
EN ISO 25178-603:2025
60.60 Standard published
Feb 26, 2025