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EN ISO 25178-603:2013

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013) EN ISO 25178-603:2013

Publication date:   Nov 20, 2013

General information

99.60   Withdrawal effective   Feb 26, 2025

CEN

CEN/TC 290 Dimensional and geometrical product specification and verification

European Norm

17.040.20   Properties of surfaces

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Scope

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

Life cycle

NOW

WITHDRAWN
EN ISO 25178-603:2013
99.60 Withdrawal effective
Feb 26, 2025

REVISED BY

PUBLISHED
EN ISO 25178-603:2025




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