EN 62047-22:2014

Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates

Publication date:   Feb 17, 2015

General information

60.60 Standard published   Sep 26, 2014

CENELEC

CLC/TC 47X

European Norm

01.080.99   Other graphical symbols

Buying

  Published

PDF - €23.81

  English  



Buy

Scope

IEC 62047-22:2014 specifies a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates. Conductive thin-film structures on flexible substrates are extensively utilized in MEMS, consumer products, and flexible electronics. The electrical behaviours of films on flexible substrates differ from those of freestanding films and substrates due to their interfacial interactions. Different combinations of flexible substrates and thin films often lead to various influences on the test results depending on the test conditions and the interfacial adhesion. The desired thickness of a thin MEMS material is 50 times thinner than that of the flexible substrate, whereas all other dimensions are similar to each other.

Life cycle

NOW

PUBLISHED
EN 62047-22:2014
60.60 Standard published
Sep 26, 2014