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EN 62047-21:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials EN 62047-21:2014

Publication date:   Feb 17, 2015

General information

60.60   Standard published   Sep 26, 2014

CENELEC

CLC/TC 47X

European Norm

31.080.99   Other semiconductor devices

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Scope

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.

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PUBLISHED
EN 62047-21:2014
60.60 Standard published
Sep 26, 2014




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