60.60 Standard published Sep 26, 2014
CENELEC
CLC/SR 47F Micro-electromechanical systems
European Norm
31.080.99 Other semiconductor devices
Published
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
PUBLISHED
EN 62047-21:2014
60.60
Standard published
Sep 26, 2014