60.60 Standard published Sep 27, 2013
CENELEC
CLC/SR 47F Micro-electromechanical systems
European Norm
31.080.99 Other semiconductor devices
Published
IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.
PUBLISHED
EN 62047-11:2013
60.60
Standard published
Sep 27, 2013