ISO 14644-10:2022

Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination ISO 14644-10:2022

Publication date:   May 4, 2022

General information

60.60 Standard published   May 4, 2022

ISO

ISO/TC 209 Cleanrooms and associated controlled environments

International Standard

13.040.35   Cleanrooms and associated controlled environments

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Scope

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.
NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.
NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 14644-10:2013

NOW

PUBLISHED
ISO 14644-10:2022
60.60 Standard published
May 4, 2022