prEN ISO 25178-607 rev

Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Design and characteristics of non-contact (confocal microscopy) instruments

Scope

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.