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prEN IEC 62047-54

Micro-electromechanical devices - Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile

General information

10.99 New project approved   Jul 22, 2024

CENELEC

CLC/SR 47F Micro-electromechanical systems

European Norm

31.080.99   Other semiconductor devices

Life cycle

NOW

IN_DEVELOPMENT
prEN IEC 62047-54
10.99 New project approved
Jul 22, 2024