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prEN IEC 62047-54

Semiconductor devices - Micro-electromechanical devices - Part 54: Measurement method of tensile strength of microstructures

General information

30.98   Project deleted   Feb 17, 2025

CENELEC

CLC/SR 47F Micro-electromechanical systems

European Norm

31.080.99   Other semiconductor devices

Life cycle

NOW

ABANDON
prEN IEC 62047-54
30.98 Project deleted
Feb 17, 2025