prEN IEC 62047-54

Micro-electromechanical devices - Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile prEN IEC 62047-54

Current stage: 10.99 New project approved Jul 22, 2024

Originator: CENELEC

Owner: CLC/SR 47F Micro-electromechanical systems

Type: European Norm

ICS: 31.080.99 Other semiconductor devices

IN_DEVELOPMENT
prEN IEC 62047-54
10.99 New project approved
Jul 22, 2024