Menu

Standards search
prEN 50XXX

prEN 50XXX

On-line monitoring of metallic contamination in silicon wafers

General information

Current stage: 30.98 Project deleted Dec 6, 2000

Originator: CENELEC

Owner: CLC/BTWG 83-1 On-line monitoring of metallic contamination in silicon wafers

Type: European Norm

Scope

This project will focus on the development of a new standard for measurement of metallic contamination in silicon wafers based upon novel photo-generated minority carrier electrical techniques.

Life cycle

NOW

ABANDON
prEN 50XXX
30.98 Project deleted
Dec 6, 2000

Relations

Adopted from BT(IE/NOT)2 IDENTICAL