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prEN 50XXX

On-line monitoring of metallic contamination in silicon wafers prEN 50XXX

General information

30.98   Project deleted   Dec 6, 2000

CENELEC

CLC/BTWG 83-1 On-line monitoring of metallic contamination in silicon wafers

European Norm

Scope

This project will focus on the development of a new standard for measurement of metallic contamination in silicon wafers based upon novel photo-generated minority carrier electrical techniques.

Life cycle

NOW

ABANDON
prEN 50XXX
30.98 Project deleted
Dec 6, 2000

Relations

Adopted from BT(IE/NOT)2 IDENTICAL




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