prEN 1518 rev

Non-destructive testing - Leak testing - Characterization of mass spectrometer leak detectors prEN 1518 rev

Scope

This European Standard specifies terms and procedures for the characterization of mass spectrometer leak detectors (MSLD). It is not intended to give a complete set of specifications for an acceptance test but a description of procedures that can be used without particular calibration equipment. An MSLD has an integral high vacuum system for maintaining the sensing element (mass spectrometer) at low operating pressure and for establishing a partial pressure related to the incoming gas flow.