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ISO/WD TR 23683

Surface chemical analysis — scanning probe microscopy — Guideline for experimental quantification of carrier concentration in semiconductor devices by using electric scanning probe microscopy

General information

20.99 WD approved for registration as CD   Sep 5, 2020

ISO

ISO/TC 201/SC 9 Scanning probe microscopy

Technical Report

71.040.40   Chemical analysis

Life cycle

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IN_DEVELOPMENT
ISO/WD TR 23683
20.99 WD approved for registration as CD
Sep 5, 2020