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ISO/TR 19319:2013

Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Publication date:   Mar 6, 2013

General information

60.60 Standard published   Mar 6, 2013

ISO

ISO/TC 201/SC 2 General procedures

Technical Report

71.040.40   Chemical analysis

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Scope

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO/TR 19319:2003

NOW

PUBLISHED
ISO/TR 19319:2013
60.60 Standard published
Mar 6, 2013