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ISO/NP 7548

Surface chemical analysis — Depth Profiling — Thickness measurement of nm hetero oxide films on Si (100) by mutual calibration with TEM and MEIS

General information

10.98   New project rejected   Jul 29, 2021

ISO

ISO/TC 201/SC 4 Depth profiling

International Standard

Life cycle

NOW

ABANDON
ISO/NP 7548
10.98 New project rejected
Jul 29, 2021